T/CASME 1573-2024
Active
Group standards
T/CASME 1573-2024 The Evaluation Specification for Green Factories in Graphene Manufacturing Industry
T/CASME 1573-2024 The Evaluation Specification for Green Factories in Graphene Manufacturing Industry
Price:
$ 20.00
Basic Information
Standard Code:
T/CASME 1573-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic components and information technology
ICS Name:
Semiconductor materials
Publish Date:
2024-07-11
Implement Date:
2024-08-01
Scope
Scope: This document applies to production plants in the graphene manufacturing industry to meet the basic requirements for green factory evaluation. For the technical requirements of factory production related products, refer to the relevant regulations of the graphene industry. It can be used for enterprise self-evaluation, second-party (related party) or third-party organization evaluation; Main technical content: This document stipulates the evaluation principles, evaluation requirements, evaluation methods and evaluation procedures, evaluation reports, and the application of evaluation results for green factory evaluation in the graphene manufacturing industry.
Development Information
Related Standards
GB/T 11093-1989
Replaced
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced