GB/T 11093-1989
Replaced
T/NXCL 015-2022
Active
Group standards
T/NXCL 015-2022 Polycrystalline silicon for silicon components
T/NXCL 015-2022 Polycrystalline silicon for silicon components
Price:
$ 20.00
Basic Information
Standard Code:
T/NXCL 015-2022
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Semiconductor materials
Publish Date:
2022-12-02
Implement Date:
2022-12-02
Scope
Main technical content: This document specifies the terms and definitions, technical requirements, test methods, inspection specifications, and marking, packaging, transportation, and storage of columnar polysilicon used in silicon components. The technical requirements include basic requirements, raw materials, chemical composition, physical properties, grain morphology, and inclusions. The test methods include chemical composition analysis methods, physical property testing methods, and methods for detecting grain morphology and inclusions. The inspection rules include inspection and acceptance, batching, inspection items, arbitration sampling and sampling, and determination of inspection results.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced