GB/T 24577-2009 Active National standards

GB/T 24577-2009 Test methods for analyzing organic contaminants on silicon wafer surfaces by thermal desorption gas chromatography

Publish Date: 2009-10-30 Implement Date: 2010-06-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 24577-2009

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Semi-metals and semiconductor materials

ICS Name: Semiconductor materials

Publish Date: 2009-10-30

Implement Date: 2010-06-01

Pages: 12 pages

Scope

1.1 This standard specifies the qualitative and quantitative methods for organic pollutants on the surface of silicon wafers, using either a gas chromatograph-mass spectrometer (GC-MS) or a phosphorus selective detector, or a combination of both. 1.2 This standard describes the thermal desorption gas chromatograph (TD-GC) and related procedures for sample preparation and analysis.