GB/T 11093-1989
Replaced
GB/T 17169-1997
Abolished
National standards
GB/T 17169-1997 Test method for the surface quality of polished silicon wafers and epitaxial wafers by optical-reflection
GB/T 17169-1997 Test method for the surface quality of polished silicon wafers and epitaxial wafers by optical-reflection
Basic Information
Standard Code:
GB/T 17169-1997
Standard Type:
National standards
Standard Status:
Abolished
is_force_gb:
no
CCS Name:
Metallographic examination methods
ICS Name:
Semiconductor materials
Publish Date:
1997-12-22
Implement Date:
1998-08-01
Pages:
12 pages
Development Information
Referenced Standards
GB/T 6624-1995 Standard method for measuring the surface quality of polished silicon slices by visual inspection
GB/T 14142-93
GB/T 14262-93
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced