GB/T 14140.1-1993
Replaced
T/CNIA 0060-2020
Active
Group standards
T/CNIA 0060-2020 The determination of phosphorous hydride content in hydrogen used for polycrystalline silicon by gas chromatography
T/CNIA 0060-2020 The determination of phosphorous hydride content in hydrogen used for polycrystalline silicon by gas chromatography
Price:
$ 20.00
Basic Information
Standard Code:
T/CNIA 0060-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Inorganic acids and alkalis
ICS Name:
Comprehensive Testing of Metal Materials
Publish Date:
2020-05-27
Implement Date:
2020-08-01
Scope
Main technical content: This standard specifies the gas chromatography method for determining the hydrogen phosphide content in hydrogen used for polycrystalline silicon. This standard is applicable to the determination of hydrogen phosphide content in hydrogen used for polycrystalline silicon, with a measurement range of 0.02×10-9 to 1×10-5 (v/v).
Development Information
Related Standards
GB/T 14140.2-1993
Replaced
GB/T 14140.2-1993 Silicon slices and wafers—Measuring of diameter—Micrometer method
GB/T 15615-1995
Abolished
GB/T 15615-1995 Test method for measuring flexure strength of silicon slices
GB/T 16481-1996
Abolished
GB/T 16481-1996 Standard spectrum tables of microwave plasma torch-atomic emitting spectrum of rare earth
GB/T 1550-1997
Replaced
GB/T 1550-1997 Standard methods for measuring conductivity type of extrinsic semiconducting materials
GB/T 1553-1997
Replaced