GB/T 6001-1985
Active
DB32/T 4378-2022
Active
Jiangsu ProvinceLocal standards
DB32/T 4378-2022 The non-destructive testing of the bulk resistance of thin films on the surface of the substrate at nanometer and sub-micrometer scales using four-probe method
DB32/T 4378-2022 The non-destructive testing of the bulk resistance of thin films on the surface of the substrate at nanometer and sub-micrometer scales using four-probe method
Basic Information
Standard Code:
DB32/T 4378-2022
Standard Type:
Local standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Seeds, seedlings, and nurseries
ICS Name:
\nGreening and afforestation
Publish Date:
2022-10-23
Implement Date:
2022-11-23
Pages:
12 pages
Scope
This document specifies a method for non-destructive four-probe testing of thin-film square resistance on the surface of substrates using conductive rubber probes. This document is applicable to the determination of square resistance for samples with visually flat surfaces and nano- and sub-micron-scale thin films, with a square resistance testing range of 1×10-4 Ω to 1×104 Ω.
Development Information
Referenced Standards
GB/T 1551-2021 Test method for measuring resistivity of monocrystal silicon—In-line four-point probe and direct current two-point probe method
GB/T 14141-2009 Test method for sheet resistance of silicon epitaxial,diffused and ion-implanted layers using a collinear four-probe array
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 33376-2016 Terms and definitions for optical functional films
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