GB/T 15678-1995
Replaced
GB/T 26307-2025
Active
National standards
GB/T 26307-2025 Silver target
GB/T 26307-2025 Silver target
Basic Information
Standard Code:
GB/T 26307-2025
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Precious metals and their alloys
ICS Name:
Other non-ferrous metal products
Publish Date:
2025-08-29
Implement Date:
2026-03-01
Pages:
12 pages
Scope
This document specifies the classification and marking of silver targets, technical requirements, test methods, inspection rules and markings, packaging, transportation, storage, and accompanying documents and purchase orders for silver targets.
This document is applicable to all types of silver sputtering targets used in semiconductor devices. Silver targets for other purposes may be used as a reference.
Development Information
Replace the following standards
Referenced Standards
GB/T 1031-1995 Surface roughness parameters and their values
GB/T 1031-2009 Geometrical Product Specifications (GPS)—Surface texture:Profile method—Surface roughness parameters and their values
GB/T 4135-2002 Silver
GB/T 4135-2016 Silver ingots
GB/T 6394-2002 Metal-methods for estimating the average grain size
GB/T 6394-2017 Determination of estimating the average grain size of metal
GB/T 8651-2002 Metal plates—Flaw detection method by the ultrasonic plate wave
GB/T 8651-2015 Flaw detection method by the ultrasonic plate wave for metal plates
GB/T 11067.1-1989 Silver—Determination of silver content—Silver chloride precipitation-flame atomic absorption spectrometric method
GB/T 11067.1-2006 Methods for chemical analysis of silver—Determination of silver content—Silver chloride precipitation-flame atomic absorption spectrometric method
GB/T 11067.2-1989 Silver—Determination of copper and gold contents—Flame atomic absorption spectrometric method
GB/T 11067.2-2006 Methods for chemical analysis of silver—Determination of copper contents—Flame atomic absorption spectrometric method
GB/T 11067.3-1989 Silver—Determination of iron, lead and bismuth contents—Flame atomic absorption spectrometric method
GB/T 11067.3-2006 Methods for chemical analysis of silver—Determination of selenium and tellurium content—Inductively coupled plasma atomic emission spectrometric method
GB/T 11067.4-1989 Silver—Determination of antimony content—2-(5-bromo-2-pyridylazo)-5-diethylaminophenol spectrophotometric method
GB/T 11067.4-2006 Methods for chemical analysis of silver—Determination of antimony content—The inductively coupled plasma atomic emission spectrometric method
GB/T 11067.5-1989 Silver—Determination of carbon content—Combustion-conductometric method
GB/T 11067.5-2006 Methods for chemical analysis of silver—Determination of lead and bismuth contents—Flame atomic absorption spectrometric method
GB/T 11067.6-1989 Silver—Determination of sulphur content—Combustion-potassium iodate titrimetric method
GB/T 11067.6-2006 Methods for chemical analysis of silver—Determination of iron contents—Flame atomic absorption spectrometric method
GB/T 11067.7-1989 Silver—Determination of copper, bismuth, iron, lead, gold and antimony contents—Emission spectrometric method
GB/T 11067.7-2024 Methods for chemical analysis of silver—Part 7:Determination of gold and palladium content—Inductively coupled plasma emission spectrometry
GB/T 15077-1994 Geometric size measuring methods of precious metals and their alloy materials
GB/T 15077-2008 Geometric size measuring methods of precious metals and their alloy materials
GB/T 36590-2018 Method for chemical analysis of high purity silver—Determination of trace impurity elements contents—Glow discharge mass spectrometry
GB/T 39810-2021 High purity silver ingots
YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies
Related Standards
GB/T 17168-1997
Replaced
GB/T 17168-1997 Dental casting precious metal alloys
GB/T 4062-1998
Replaced
GB/T 4062-1998 Antimony trioxide
GB/T 13560-2000
Replaced
GB/T 13560-2000 Materials for sintered neodymium iron boron permanent magnets
GB/T 18113-2000
Replaced
GB/T 18113-2000 Heating element of lanthanum chromite in high temperature
GB/T 9967-2001
Replaced