GB/T 26307-2025 Active National standards

GB/T 26307-2025 Silver target

GB/T 26307-2025 Silver target

Publish Date: 2025-08-29 Implement Date: 2026-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 26307-2025
Standard Type: National standards
Standard Status: Active
is_force_gb: no
CCS Name: Precious metals and their alloys
ICS Name: Other non-ferrous metal products
Publish Date: 2025-08-29
Implement Date: 2026-03-01
Pages: 12 pages

Scope

This document specifies the classification and marking of silver targets, technical requirements, test methods, inspection rules and markings, packaging, transportation, storage, and accompanying documents and purchase orders for silver targets.
This document is applicable to all types of silver sputtering targets used in semiconductor devices. Silver targets for other purposes may be used as a reference.

Development Information

Word Count: 15 Thousand words Pages: 12 pages

Replace the following standards

Referenced Standards

GB/T 1031-1995 Surface roughness parameters and their values GB/T 1031-2009 Geometrical Product Specifications (GPS)—Surface texture:Profile method—Surface roughness parameters and their values GB/T 4135-2002 Silver GB/T 4135-2016 Silver ingots GB/T 6394-2002 Metal-methods for estimating the average grain size GB/T 6394-2017 Determination of estimating the average grain size of metal GB/T 8651-2002 Metal plates—Flaw detection method by the ultrasonic plate wave GB/T 8651-2015 Flaw detection method by the ultrasonic plate wave for metal plates GB/T 11067.1-1989 Silver—Determination of silver content—Silver chloride precipitation-flame atomic absorption spectrometric method GB/T 11067.1-2006 Methods for chemical analysis of silver—Determination of silver content—Silver chloride precipitation-flame atomic absorption spectrometric method GB/T 11067.2-1989 Silver—Determination of copper and gold contents—Flame atomic absorption spectrometric method GB/T 11067.2-2006 Methods for chemical analysis of silver—Determination of copper contents—Flame atomic absorption spectrometric method GB/T 11067.3-1989 Silver—Determination of iron, lead and bismuth contents—Flame atomic absorption spectrometric method GB/T 11067.3-2006 Methods for chemical analysis of silver—Determination of selenium and tellurium content—Inductively coupled plasma atomic emission spectrometric method GB/T 11067.4-1989 Silver—Determination of antimony content—2-(5-bromo-2-pyridylazo)-5-diethylaminophenol spectrophotometric method GB/T 11067.4-2006 Methods for chemical analysis of silver—Determination of antimony content—The inductively coupled plasma atomic emission spectrometric method GB/T 11067.5-1989 Silver—Determination of carbon content—Combustion-conductometric method GB/T 11067.5-2006 Methods for chemical analysis of silver—Determination of lead and bismuth contents—Flame atomic absorption spectrometric method GB/T 11067.6-1989 Silver—Determination of sulphur content—Combustion-potassium iodate titrimetric method GB/T 11067.6-2006 Methods for chemical analysis of silver—Determination of iron contents—Flame atomic absorption spectrometric method GB/T 11067.7-1989 Silver—Determination of copper, bismuth, iron, lead, gold and antimony contents—Emission spectrometric method GB/T 11067.7-2024 Methods for chemical analysis of silver—Part 7:Determination of gold and palladium content—Inductively coupled plasma emission spectrometry GB/T 15077-1994 Geometric size measuring methods of precious metals and their alloy materials GB/T 15077-2008 Geometric size measuring methods of precious metals and their alloy materials GB/T 36590-2018 Method for chemical analysis of high purity silver—Determination of trace impurity elements contents—Glow discharge mass spectrometry GB/T 39810-2021 High purity silver ingots YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies

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