GB/T 3656-1983
Replaced
GB/T 41765-2022
Active
National standards
GB/T 41765-2022 Test method for dislocation density of monocrystalline silicon carbide
GB/T 41765-2022 Test method for dislocation density of monocrystalline silicon carbide
Basic Information
Standard Code:
GB/T 41765-2022
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
\nTest methods for the physical properties of metals
ICS Name:
\nMetal material testing
Publish Date:
2022-10-12
Implement Date:
2023-05-01
Publisher:
国家市场监督管理总局、国家标准化管理委员会
Technical Committee:
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分技术委员会(SAC/TC 203/SC 2)
Pages:
11 pages
Scope
本文件规定了碳化硅单晶位错密度的测试方法。
本文件适用于晶面偏离{0001}面、偏向112-0方向0°～8°的碳化硅单晶位错密度的测试。
Development Information
Drafting Units:
北京天科合达半导体股份有限公司、有色金属技术经济研究院有限责任公司
Drafting Persons:
彭同华、佘宗静、娄艳芳、王大军、赵宁、王波、郭钰、杨建、李素青
Referenced Standards
GB/T 14264-1993 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2024 Terminology of semiconductor materials
GB/T 30656-2014 Polished monocrystalline silicon carbide wafers
GB/T 30656-2023 Polished monocrystalline silicon carbide wafers
Related Standards
GB/T 3657-1983
Replaced
GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys
GB/T 3849-1983
Replaced
GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method
GB/T 3850-1983
Replaced
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3851-1983
Replaced
GB/T 3851-1983 Hardmetals—determination of transverse rupture strength
GB/T 4326-1984
Replaced