GB/T 46191-2025 Active National standards

GB/T 46191-2025 Electronic grade pentakis(dimethylamide) tantalum

Publish Date: 2025-10-05 Implement Date: 2026-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: GB/T 46191-2025

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Electronic devices and specialized materials, parts, and structural components

ICS Name: Special materials for electronic technology

Publish Date: 2025-10-05

Implement Date: 2026-05-01

Pages: 16 pages

Scope

This document specifies the technical requirements, inspection rules, packaging, marking, and accompanying documents for electronic-grade pentamethylenediamine tantalum used in the semiconductor industry, as well as requirements for transportation, storage, and safety information. It also describes the corresponding testing methods.
This document is applicable to electronic-grade pentamethylenediamine tantalum used in the deposition of tantalum-based films such as tantalum nitride, tantalum oxide, and tantalum dopants.

Development Information

Word Count: 23 Thousand words Pages: 16 pages

Referenced Standards

GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB/T 6679-2003 General rules for sampling solid chemical products GB/T 11446.1-1997 Electronic grade water GB/T 11446.1-2013 Electronic grade water GB 12463-1990 General specifications for transport packages of dangerous goods GB 12463-2009 General specifications for transport packages of dangerous goods GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals GB 15258-2009 General rules for preparation of precautionary label for chemicals GB 15603-1995 Rule for storage of chemical dangers GB 15603-2022 General rules for the hazardous chemicals warehouse storage GB/T 16483-2008 Safety data sheet for chemical products—Content and order of sections GB/T 17519-2013 Guidance on the compilation of safety data sheet for chemical products GB/T 25915.1-2010 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness by particle concentration GB/T 32566-2016 Welded stainless steel cylinders GB/T 32566.2-2025 Welded stainless steel cylinders—Part 2:Test pressure greater than 6MPa SJ/T 11637-2016 Electronic chemicals and ICP-MS general rules GB/T 32566.1-2026 Welded stainless steel cylinders—Part 1:Test pressure 6 MPa and below

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