GB/T 15678-1995
Replaced
YS/T 1025-2015
Active
Industry standards-Non-ferrous metals
YS/T 1025-2015 High-purity tungsten and tungsten alloy sputtering target used in electronic film
YS/T 1025-2015 High-purity tungsten and tungsten alloy sputtering target used in electronic film
Basic Information
Standard Code:
YS/T 1025-2015
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Rare high-melting-point metals and their alloys
ICS Name:
Other non-ferrous metal products
Publish Date:
2015-04-30
Implement Date:
2015-10-01
Pages:
10 pages
Scope
This standard specifies the requirements, test methods, inspection rules, and marking, packaging, transportation, storage, order forms (or contracts), etc. for high-purity tungsten and tungsten alloy sputtering targets used in electronic thin films.
This standard applies to high-purity tungsten and tungsten alloy sputtering targets, referred to as high-purity tungsten and tungsten alloy targets hereinafter.
Development Information
Referenced Standards
GB/T 1031-1995 Surface roughness parameters and their values
GB/T 1031-2009 Geometrical Product Specifications (GPS)—Surface texture:Profile method—Surface roughness parameters and their values
GB/T 1804-2000 General tolerances for linear and angular dimensions without individual tolerance indications
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3850-2015 Impermeable sintered metal materials and hardmetals—Determination of density
GB/T 4324.23-2012 Methods for chemical analysis of tungsten—Part 23:Determination of sulfur content—The combustion-conductometric titration and high frequency combustion-infrared absorption method
GB/T 4324.25-2012 Methods for chemical analysis of tungsten—Part 25:Determination of oxygen content—Pulse heating inert gas fusion-infrared absorption method
GB/T 4324.26-2012 Methods for chemical analysis of tungsten—Part 26:Determination of nitrogen content—Pulse heating inert gas fusion-thermal conductive method and the Nessler reagent spectrophotometry
GB/T 4324.27-2012 Methods for chemical analysis of tungsten—Part 27:Determination of carbon content—High frequency combustion-infrared absorption method
GB/T 6394-2002 Metal-methods for estimating the average grain size
GB/T 6394-2017 Determination of estimating the average grain size of metal
GB/T 8651-2002 Metal plates—Flaw detection method by the ultrasonic plate wave
GB/T 8651-2015 Flaw detection method by the ultrasonic plate wave for metal plates
YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies
YS/T 900-2013 Methods for chemical analysis of the high purity tungsten—Determination of trace impurity element content—Inductively coupled plasma mass spectrometry
YS/T 901-2013 Methods for chemical analysis of high purity tungsten—Determination of trace impurity element content—Glow discharge mass spectrometry
GB/T 4324.23-1984 Methods for chemical analysis of tungsten--The combustion-conductometric titration method for the determination of suphur content
GB/T 4324.25-1984 Methods for chemical analysis of tungsten--The inert gas fusion-coulometric titration method for the determination of oxygen content
GB/T 4324.26-1984 Methods for chemical analysis of tungsten--The Nessler reagent photometric method for the determination of nitrogen content
GB/T 4324.27-1984 Methods for chemical analysisof tungsten--The combustion-coulometric titration method for the determinationof carbon content
YS/T 900-2024 YS/T 900-2024 Welding wire - Method for chemical analysis of high purity tungsten - Determination of trace impurity element content - Inductively coupled plasma mass spectrometry
YS/T 901-2024 YS/T 901-2024 Methods for chemical analysis of high purity tungsten - Determination of trace element content - Glow discharge mass spectrometry
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GB/T 9967-2001
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