GB/T 20252-2006
Replaced
YS/T 1053-2015
Active
Industry standards-Non-ferrous metals
YS/T 1053-2015 High-purity cobalt sputtering target used in electronic film
YS/T 1053-2015 High-purity cobalt sputtering target used in electronic film
Basic Information
Standard Code:
YS/T 1053-2015
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Heavy metals and their alloys
ICS Name:
Cadmium and cobalt products
Publish Date:
2015-04-30
Implement Date:
2015-10-01
Pages:
11 pages
Scope
This standard specifies the requirements, test methods, inspection rules, and marking, packaging, transportation, storage, quality certificates, and order forms (or contracts) for high-purity cobalt targets used in electronic thin films (hereinafter referred to as high-purity cobalt targets).
This standard applies to all types of high-purity cobalt targets used in the manufacture of electronic thin films.
Development Information
Referenced Standards
GB/T 1804-2000 General tolerances for linear and angular dimensions without individual tolerance indications
GB/T 2828.1-2003 Sampling procedures for inspection by attributes—Part 1:Sampling schemes indexed by acceptance quality limit(AQL) for lot-by-lot inspection
GB/T 2828.1-2012 Sampling procedures for inspection by attributes—Part 1:Sampling schemes indexed by acceptance quality limit(AQL) for lot-by-lot inspection
GB/T 6394-2002 Metal-methods for estimating the average grain size
GB/T 6394-2017 Determination of estimating the average grain size of metal
GB/T 8651-2002 Metal plates—Flaw detection method by the ultrasonic plate wave
GB/T 8651-2015 Flaw detection method by the ultrasonic plate wave for metal plates
GB/T 14265-1993 General rule of chemical analysis for hydrogen, oxygen, nitrogen, carbon and sulfur in metal's materials
GB/T 14265-2017 General rule of chemical analysis for hydrogen,oxygen, nitrogen, carbon and sulfur in metallic materials
YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies
YS/T 1011-2014 Methods for chemical analysis of high purity cobalt—Determination of impurity elements content—Glow discharge mass spectrometry
YS/T 1011-2025 The determination of impurity element content in high purity cobalt by glow discharge mass spectrometry