GB/T 11093-1989
Replaced
YS/T 1828-2025
Pending
Industry standards-Non-ferrous metals
YS/T 1828-2025 Diffusion film used for doping semiconductor materials
YS/T 1828-2025 Diffusion film used for doping semiconductor materials
Basic Information
Standard Code:
YS/T 1828-2025
Standard Type:
Industry standards
Standard Status:
Pending
is_force_gb:
no
CCS Name:
Compound semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2025-12-17
Implement Date:
2026-07-01
Publisher:
工业和信息化部
Scope
本文件规定了半导体材料掺杂用扩散膜的术语和定义、分类和牌号、技术要求、试验方法、检验规则、标志、包装、运输、贮存及随行文件和订货单内容。本文件适用于分立器件用半导体材料掺杂用扩散膜的生产和检测。
Development Information
Drafting Units:
Drafting Persons:
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced