GB/T 3656-1983
Replaced
GB/T 43313-2023
Active
National standards
GB/T 43313-2023 Test method for surface quality and micropipe density of polished silicon carbide wafers—Confocal and differential interferometry optics
GB/T 43313-2023 Test method for surface quality and micropipe density of polished silicon carbide wafers—Confocal and differential interferometry optics
Basic Information
Standard Code:
GB/T 43313-2023
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
\nTest methods for the physical properties of metals
ICS Name:
\nMetal material testing
Publish Date:
2023-11-27
Implement Date:
2024-06-01
Pages:
7 pages
Scope
This document specifies the confocal differential interference testing method for the surface quality and microtube density of 4H silicon carbide polished wafers.
This document is applicable to the testing of the surface quality and microtube density of silicon carbide polished wafers with diameters of 50.8 mm, 76.2 mm, 100 mm, 150 mm, and 200 mm, and a thickness range of 300 μm to 1,000 μm.
Development Information
Referenced Standards
GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness by particle concentration
GB/T 14264-1993 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2024 Terminology of semiconductor materials
GB/T 30656-2014 Polished monocrystalline silicon carbide wafers
GB/T 30656-2023 Polished monocrystalline silicon carbide wafers
Related Standards
GB/T 3657-1983
Replaced
GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys
GB/T 3849-1983
Replaced
GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method
GB/T 3850-1983
Replaced
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3851-1983
Replaced
GB/T 3851-1983 Hardmetals—determination of transverse rupture strength
GB/T 4326-1984
Replaced