GB/T 3656-1983
Replaced
GB/T 47089-2026
Active
National standards
GB/T 47089-2026 Test method for determining geometrical parameters of patterns on patterned sapphire substrate
GB/T 47089-2026 Test method for determining geometrical parameters of patterns on patterned sapphire substrate
Price:
$ 36.00
Basic Information
Standard Code:
GB/T 47089-2026
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Analysis methods for semi-metallic and semiconductor materials
ICS Name:
\nMetal material testing
Publish Date:
2026-01-28
Implement Date:
2026-08-01
Pages:
16 pages
Scope
This document describes the method for measuring the geometric parameters of patterns on the surface of a sapphire patterned substrate.
This document is applicable to the measurement of the geometric parameters of individual patterns and pattern arrays on the surface of a sapphire patterned substrate.
Development Information
Referenced Standards
GB/T 14264-1993 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2024 Terminology of semiconductor materials
GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness by particle concentration
GB/T 43662-2024 Patterned sapphire substrate
Related Standards
GB/T 3657-1983
Replaced
GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys
GB/T 3849-1983
Replaced
GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method
GB/T 3850-1983
Replaced
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3851-1983
Replaced
GB/T 3851-1983 Hardmetals—determination of transverse rupture strength
GB/T 4326-1984
Replaced