GB/T 11093-1989
Replaced
GB/T 43662-2024
Active
National standards
GB/T 43662-2024 Patterned sapphire substrate
GB/T 43662-2024 Patterned sapphire substrate
Basic Information
Standard Code:
GB/T 43662-2024
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Compound semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2024-03-15
Implement Date:
2024-10-01
Pages:
24 pages
Scope
This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, accompanying documents, and order form content for sapphire patterned substrates (hereinafter referred to as "substrates"). This document is applicable to the research and development, production, testing, inspection, and performance and quality evaluation of sapphire patterned substrates.
Development Information
Referenced Standards
GB/T 2828.1-2012 Sampling procedures for inspection by attributes—Part 1:Sampling schemes indexed by acceptance quality limit(AQL) for lot-by-lot inspection
GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness by particle concentration
GB/T 8758-1988 Measuring thickness of epitaxial layers of gallium arsenide by infrared interference
GB/T 8758-2006 Measuring thickness of epitaxial layers of gallium arsenide by infrared interference
GB/T 14140-2009 Test method for measuring diameter of semiconductor wafer
GB/T 14140.1-1993 Silicon slices and wafers—Measuring of diameter—Optical projecting method
GB/T 14140.2-1993 Silicon slices and wafers—Measuring of diameter—Micrometer method
GB/T 14264-1993 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2024 Terminology of semiconductor materials
GB/T 20307-2006 General rules for nanometer-scale length measurement by SEM
GB/T 14140-2025 Test method for measuring diameter of semiconductor wafer
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced