GB/T 11093-1989
Replaced
T/NXCL 28-2024
Active
Group standards
T/NXCL 28-2024 Synthetic quartz crucible used for growth of monocrystalline silicon for semiconductor grade
T/NXCL 28-2024 Synthetic quartz crucible used for growth of monocrystalline silicon for semiconductor grade
Price:
$ 20.00
Basic Information
Standard Code:
T/NXCL 28-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Semiconductor materials
Publish Date:
2024-02-06
Implement Date:
2024-02-06
Scope
Main technical content: This document specifies the terms and definitions, dimensional specifications, technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage for synthetic quartz crucibles used in the growth of semiconductor-grade monocrystalline silicon. This document is applicable to quartz crucibles used in the growth of semiconductor-grade monocrystalline silicon by the arc melting method, with synthetic quartz sand (component: silicon dioxide) as the inner layer material.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced