T/IAWBS 018-2022
Active
Group standards
T/IAWBS 018-2022 Testing method for the dislocation density of diamond single crystal polished wafers
T/IAWBS 018-2022 Testing method for the dislocation density of diamond single crystal polished wafers
Price:
$ 20.00
Basic Information
Standard Code:
T/IAWBS 018-2022
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Semiconductor materials
Publish Date:
2022-12-15
Implement Date:
2022-12-22
Scope
Scope: This document specifies the test method for dislocation density of diamond single-crystal polishing slices. This document is applicable to the testing of dislocation density of diamond single-crystal polishing slices; Main technical content: Based on the material performance characteristics of diamond single crystals and combined with the current research level of dislocation density detection technologies for other single crystals such as sapphire at home and abroad, this standard stipulates the testing principles, measurement accuracy assurance, and measurement steps for the dislocation density of diamond single-crystal polishing slices
Development Information
Related Standards
GB/T 11093-1989
Replaced
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced