GB/T 11093-1989
Replaced
T/NXCL 003-2021
Abolished
Group standards
T/NXCL 003-2021 Planar Silicon-Germanium Target Material
T/NXCL 003-2021 Planar Silicon-Germanium Target Material
Price:
$ 20.00
Basic Information
Standard Code:
T/NXCL 003-2021
Standard Type:
Group standards
Standard Status:
Abolished
is_force_gb:
no
CCS Name:
Non-ferrous metals and their alloy products
ICS Name:
Semiconductor materials
Publish Date:
2021-11-11
Implement Date:
2021-11-11
Scope
Main technical content: This document specifies the terms and definitions, technical requirements, test methods, inspection specifications, marking, packaging, transportation, storage, and other aspects of large-sized annular silicon-germanium targets. The technical requirements include basic requirements, materials, chemical composition, physical properties, physical specifications, surface quality, internal defects, overlap rate, flatness, and backing material. The test methods include arbitration analysis methods for chemical composition, testing methods for physical properties, and measurement methods for physical specifications, surface quality, internal defects, and overlap rate. The inspection rules include inspection and acceptance, batching, inspection items, arbitration sampling and sampling, and determination of inspection results.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced