GB/T 11093-1989
Replaced
T/CAS 304-2018
Active
Group standards
T/CAS 304-2018 Magnetron sputtering silicon target and bonding target material
T/CAS 304-2018 Magnetron sputtering silicon target and bonding target material
Price:
$ 20.00
Basic Information
Standard Code:
T/CAS 304-2018
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
\nMagnetic components
ICS Name:
Semiconductor materials
Publish Date:
2018-05-29
Implement Date:
2018-05-29
Scope
Scope: This standard specifies the classification and grades, raw materials, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, supply status, and order form (or contract) content of magnetron sputtering silicon targets. This standard applies to various magnetron sputtering silicon targets used in semiconductors and other electronic devices; Main technical content: This standard specifies the classification and grades, raw materials, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, supply status, and order form (or contract) content of magnetron sputtering silicon targets. This standard applies to various magnetron sputtering silicon targets used in semiconductors and other electronic devices.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced