GB/T 11093-1989
Replaced
T/ICMTIA 5.3-2020
Active
Group standards
T/ICMTIA 5.3-2020 The method of inspecting ArF photoresist used in integrated circuits using optical lithography
T/ICMTIA 5.3-2020 The method of inspecting ArF photoresist used in integrated circuits using optical lithography
Price:
$ 38.00
Basic Information
Standard Code:
T/ICMTIA 5.3-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
High-purity reagents and high-purity substances
ICS Name:
Semiconductor materials
Publish Date:
2020-12-31
Implement Date:
2021-03-01
Scope
Scope: This document is applicable to ArF photoresists for integrated circuits; Main technical content: This document specifies the requirements and methods for photoresistance testing of ArF photoresists, as well as testing standards and requirements for packaging, transportation, storage, and environmental protection.
Development Information
Same series standard
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced