GB/T 11093-1989
Replaced
T/CNIA 0103-2021
Active
Group standards
T/CNIA 0103-2021 Green Design Product Evaluation Technical Specification for Electronic Grade Chlorosilane
T/CNIA 0103-2021 Green Design Product Evaluation Technical Specification for Electronic Grade Chlorosilane
Price:
$ 20.00
Basic Information
Standard Code:
T/CNIA 0103-2021
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Semiconductor materials
Publish Date:
2021-03-19
Implement Date:
2021-09-01
Scope
Main technical content: This document specifies the evaluation requirements for green design products of electronic-grade chlorosilane, the preparation method of product life cycle assessment reports, and the evaluation methods and processes. This document is applicable to the evaluation of green design products of electronic-grade chlorosilane (including electronic-grade trichlorohydrosilane, silicon tetrachloride, dichlorodihydrosilane, and hexachloroethylsilane) produced by refining and purifying industrial chlorosilane products as raw materials.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced