GB/T 11093-1989
Replaced
T/CZSBDTHYXH 001-2023
Active
Group standards
T/CZSBDTHYXH 001-2023 Semiconductor wafer defect automatic optical inspection equipment
T/CZSBDTHYXH 001-2023 Semiconductor wafer defect automatic optical inspection equipment
Price:
$ 20.00
Basic Information
Standard Code:
T/CZSBDTHYXH 001-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Semiconductor materials
Publish Date:
2023-08-08
Implement Date:
2023-08-09
Scope
Main technical content: This standard specifies the terms and definitions, product models, requirements, inspection methods, inspection rules, marking, packaging, transportation, and storage requirements for optical detectors of semiconductor wafer defects
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced