GB/T 11093-1989
Replaced
YS/T 28-2024
Active
Industry standards-Non-ferrous metals
YS/T 28-2024 YS/T 28-2024 Silicon wafer packaging and labeling
YS/T 28-2024 YS/T 28-2024 Silicon wafer packaging and labeling
Basic Information
Standard Code:
YS/T 28-2024
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Semi-metals and semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2024-10-24
Implement Date:
2025-05-01
Scope
This document is applicable to silicon single-crystal polished wafers, silicon epitaxial wafers, SOI silicon wafers, silicon single-crystal corroded wafers, silicon single-crystal polished wafers, and silicon wafers used in solar cells. Other wafers can be used as a reference for this document
Development Information
Replace the following standards
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced