GB/T 11093-1989
Replaced
YS/T 28-2015
Abolished
Industry standards-Non-ferrous metals
YS/T 28-2015 Package of silicon wafers
YS/T 28-2015 Package of silicon wafers
Basic Information
Standard Code:
YS/T 28-2015
Standard Type:
Industry standards
Standard Status:
Abolished
is_force_gb:
no
CCS Name:
Semi-metals and semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2015-04-30
Implement Date:
2015-10-01
Pages:
12 pages
Scope
This standard specifies the packaging of silicon wafers.
This standard applies to the clean packaging of silicon single-crystal polished wafers, epitaxial wafers, SOI wafers, and other silicon wafers. It also applies to the packaging of silicon single-crystal polished wafers (referred to as silicon polished wafers) and the packaging of silicon wafers used in solar cells, with the aim of preventing them from being contaminated or broken during transportation and storage.
Development Information
Replace the following standards
Referenced Standards
GB/T 12964-2003 Monocrystalline silicon polished wafers
GB/T 12964-2018 Monocrystalline silicon polished wafers
GB/T 12965-1996 Monocrystalline silicon as cut slices and lapped slices
GB/T 12965-2005 Monocrystalline silicon as cut slices and lapped slices
GB/T 12965-2018 Monocrystalline silicon as cut wafers and lapped wafers
GB/T 14139-1993 Silicon epitaxial wafers
GB/T 14139-2009 Silicon epitaxial wafers
GB/T 14139-2019 Silicon epitaxial wafers
GB/T 14264-1993 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2024 Terminology of semiconductor materials
GB/T 26071-2010 Mono-crystalline silicon as cut slices for photovoltaic solar cells
GB/T 26071-2018 Monocrystalline silicon wafers for solar cells
GB/T 29055-2012 Multi-crystalline silicon wafer for solar cell
GB/T 29055-2019 Multicrystalline silicon wafers for photovoltaic solar cell
GB/T 29506-2013 300 mm polished monocrystalline silicon wafers
GB 50073-2013 Code for design of clean room
GB/T 26071-2026 Monocry stallinesilicon and wafers for solar cells
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced