GB/T 11093-1989
Replaced
GB/T 16595-1996
Replaced
National standards
GB/T 16595-1996 Specification for a universal wafer grid
GB/T 16595-1996 Specification for a universal wafer grid
Basic Information
Standard Code:
GB/T 16595-1996
Standard Type:
National standards
Standard Status:
Replaced
is_force_gb:
no
CCS Name:
Element semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
1996-11-04
Implement Date:
1997-04-01
Pages:
6 pages
Development Information
Superseded by the following standards
Referenced Standards
GB/T 1554-1995 Test method for crystallographic perfection of silicon by preferential etch techniques
GB/T 6624-1995 Standard method for measuring the surface quality of polished silicon slices by visual inspection
GB/T 12964-1991
GB/T 14139-93
GB/T 14142-93
GB/T 14264-93
YS/T 209-94
Adopt standards
SEMI M17-1990
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced