GB/T 34085-2017 Active National standards

GB/T 34085-2017 Gas for electronic industry—Trifluoromethane

Publish Date: 2017-07-31 Implement Date: 2017-11-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34085-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Industrial gases

Publish Date: 2017-07-31

Implement Date: 2017-11-01

Pages: 7 pages

Scope

This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of trifluoromethane used in the electronics industry. This standard applies to trifluoromethane products prepared from dichlorofluoromethane, trichloromethane, and hydrogen fluoride. It is used as an etching gas in the plasma etching process in the electronics industry. Molecular formula: CHF3. Relative molecular mass: 70.013 (based on the 2011 International Relative Atomic Mass).

Development Information

Word Count: 12 Thousand words Pages: 7 pages

Referenced Standards

危险化学品安全管理条例(2002版) 特种设备安全监察条例(2009版) GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB/T 5099-1994 Seamless steel gas cylinders GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders GB/T 5832.3-2011 Determination of moisture in gases—Part 3:The method of Cavity Ring-Down Spectroscopy GB 7144-1999 Colored cylinder mark for gases GB/T 7144-2016 Coloured cylinder mark for gases GB 14193-1993 Rules for filling of liquefied gas cylinders GB/T 14193-2009 Rules for filling of liquefied gas cylinders GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals GB 15258-2009 General rules for preparation of precautionary label for chemicals GB 16804-1997 Precautionary labels for gas cylinders GB/T 16804-2011 Precautionary labels for gas cylinders GB/T 26571-2011 Specification for the shelf life of a specialty gas GB/T 28726-2012 Gas analysis—Gas chromatograph with helium ionization detector TSG R0006-2014 Supervision Regulation on Safety Technology for Gas Cylinder GB/T 14193.1-2025 Rules for the filling of liquefied gas cylinders—Part1:Industrial gas cylinder GB/T 5832.3-2025 Gas analysis—Determination of moisture in gases—Part 3:The method of cavity ring-down spectroscopy GB/T 28726-2025 Gas analysis—Gas chromatograph with helium ionization detector

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