GB/T 34899-2017 Active National standards

GB/T 34899-2017 Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy

Publish Date: 2017-11-01 Implement Date: 2018-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34899-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Microcircuit

ICS Name: Integrated circuits, microelectronics

Publish Date: 2017-11-01

Implement Date: 2018-05-01

Pages: 14 pages

Scope

This standard specifies the method of determining the residual stress, relative static stress, and relative dynamic stress on the surface of micro-electromechanical systems (MEMS) structures using Raman spectroscopy. This standard is applicable to the testing of residual stress, relative static stress, and relative dynamic stress on the surface of MEMS structures using Raman spectroscopy.

Development Information

Word Count: 26 Thousand words Pages: 14 pages

Referenced Standards

JJF 1544-2015 Calibration Specification for Raman Spectrometers GB/T 2421.1-2008 Environmental testing for electric and electronic products—General and guidance GB/T 25915.1-2010 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness by particle concentration GB/T 26111-2010 Micro-electromechanical system technology—Terms GB/T 26111-2023 Micro-electromechanical system technology—Terms

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