GB/T 11093-1989
Replaced
YS/T 1825-2025
Active
Industry standards-Non-ferrous metals
YS/T 1825-2025 Silane, tetramethyl for integrated circuits
YS/T 1825-2025 Silane, tetramethyl for integrated circuits
Price:
$ 20.00
Basic Information
Standard Code:
YS/T 1825-2025
Standard Type:
Industry standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Semi-metals and semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2025-12-17
Implement Date:
2026-07-01
Scope
This document specifies the classification, technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, and accompanying documents and order forms for tetramethylsilane. This document is applicable to tetramethylsilane used in the manufacturing of integrated circuits.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced