GB/T 11093-1989
Replaced
T/SHDSGY 135-2023
Active
Group standards
T/SHDSGY 135-2023 New energy semiconductor silicon material technology
T/SHDSGY 135-2023 New energy semiconductor silicon material technology
Price:
$ 20.00
Basic Information
Standard Code:
T/SHDSGY 135-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Semiconductor materials
Publish Date:
2023-05-30
Implement Date:
2023-05-30
Scope
Main technical content: This document specifies the terms and definitions, technical requirements for silicon wafers, the production process of semiconductor silicon wafers, test methods, inspection specifications, packaging, transportation, storage, and quality certificates. This document is applicable to the technology of new energy semiconductor silicon wafer materials.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced