GB/T 11093-1989
Replaced
T/ICMTIA SM006-2021
Active
Group standards
T/ICMTIA SM006-2021 300mm P/P-type silicon epitaxial wafers for logic processes with an integrated circuit linewidth of 65nm-14nm
T/ICMTIA SM006-2021 300mm P/P-type silicon epitaxial wafers for logic processes with an integrated circuit linewidth of 65nm-14nm
Price:
$ 38.00
Basic Information
Standard Code:
T/ICMTIA SM006-2021
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Element semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2021-05-31
Implement Date:
2021-07-30
Scope
Main technical content: This document specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, storage, and quality certificates for 300mm P/P-type silicon epitaxial wafers with a (100) crystal orientation. This document is applicable to 300mm P/P-type silicon epitaxial wafers used in integrated circuit logic processes with line widths of 65nm-14nm.
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced