GB/T 47080-2026 Active National standards

GB/T 47080-2026 Test method for dislocation density of diamond single crystal polished wafer

GB/T 47080-2026 Test method for dislocation density of diamond single crystal polished wafer

Publish Date: 2026-01-28 Implement Date: 2026-08-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us
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Basic Information

Standard Code: GB/T 47080-2026
Standard Type: National standards
Standard Status: Active
is_force_gb: no
CCS Name: Analysis methods for semi-metallic and semiconductor materials
ICS Name: \nMetal material testing
Publish Date: 2026-01-28
Implement Date: 2026-08-01
Pages: 12 pages

Scope

This document describes a method for measuring the dislocation density of cubic diamond single-crystal polishing wafers using dry etching combined with microscopic counting tests.
This document is suitable for testing the dislocation density of cubic diamond single-crystal polishing wafers with {100}, {110}, or {111 } crystal faces, with a range of 5×10^3 dislocations/cm2 to 5×10^7 dislocations/cm2.

Development Information

Word Count: 12 Thousand words Pages: 12 pages

Referenced Standards

Related Standards

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