YS/T 986-2014 Active Industry standards-Non-ferrous metals

YS/T 986-2014 Specification for serial alphanumeric marking of the front surface of wafers

YS/T 986-2014 Specification for serial alphanumeric marking of the front surface of wafers

Publish Date: 2014-10-14 Implement Date: 2015-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: YS/T 986-2014

Standard Type: Industry standards

Standard Status: Active

is_force_gb: no

CCS Name: Semi-metals and semiconductor materials

ICS Name: Semiconductor materials

Publish Date: 2014-10-14

Implement Date: 2015-04-01

Pages: 11 pages

Scope

This standard defines the geometric dimensions and spatial positions of markings, including alphanumeric characters, which are particularly suitable for silicon wafers with reference planes and notches.
This standard does not address the technology of marking production.

Development Information

Word Count: 20 Thousand words Pages: 11 pages

Referenced Standards

SEMI M13 SEMI AUX001 SEMI AUX015

Adopt standards

SEMI M12-0706

Related Standards

GB/T 11093-1989 Replaced

GB/T 11093-1989 Liquid encapsulated czochralski-grown gallium arsenide single crystals and As-cut slices

Publish Date: 1989-03-31

GB/T 13388-1992 Replaced

GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques

Publish Date: 1992-02-19

GB/T 13389-1992 Replaced

GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon

Publish Date: 1992-02-19

GB/T 13843-1992 Abolished

GB/T 13843-1992 Polished monocrystalline sapphire substrates

Publish Date: 1992-12-28

GB/T 14015-1992 Active

GB/T 14015-1992 Silicon on sapphire epitaxial wafers

Publish Date: 1992-12-28

GB/T 14139-1993 Replaced

GB/T 14139-1993 Silicon epitaxial wafers

Publish Date: 1993-02-06