GB/T 18033-2000
Replaced
GB/T 39159-2020
Active
National standards
GB/T 39159-2020 High purity copper alloy target for integrated circuit
GB/T 39159-2020 High purity copper alloy target for integrated circuit
Basic Information
Standard Code:
GB/T 39159-2020
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Heavy metals and their alloys
ICS Name:
Copper products
Publish Date:
2020-11-19
Implement Date:
2021-10-01
Pages:
11 pages
Scope
This standard specifies the classification, technical requirements, test methods, inspection rules, and marking, packaging, transportation, storage, quality certificates, and order forms (or contracts) for high-purity copper alloy targets used in integrated circuits (hereinafter referred to as targets).
This standard applies to high-purity copper-aluminum (CuAl) alloy targets and high-purity copper-manganese (CuMn) alloy targets used in integrated circuit manufacturing.
Development Information
Referenced Standards
GB/T 8170-1987 Rules for rounding off of numberical values
GB/T 8170-2008 Rules of rounding off for numerical values & expression and judgement of limiting values
GB/T 8651-2002 Metal plates—Flaw detection method by the ultrasonic plate wave
GB/T 8651-2015 Flaw detection method by the ultrasonic plate wave for metal plates
GB/T 14265-1993 General rule of chemical analysis for hydrogen, oxygen, nitrogen, carbon and sulfur in metal's materials
GB/T 14265-2017 General rule of chemical analysis for hydrogen,oxygen, nitrogen, carbon and sulfur in metallic materials
GB/T 36165-2018 Determination of average grain size of metal—Electron backscatter diffraction (EBSD)method
YS/T 347-2004 Copper and copper alloys—Estimation of average grain size
YS/T 482-2005 Methods for analysis of copper and copper alloys—The atomic emission spectrometry
YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies
YS/T 922-2013 Methods for chemical analysis of high purity copper—Determination of trace impurity elements content—Glow discharge mass spectrometry
YS/T 347-2020 The method for measuring the average grain size of copper and copper alloys
YS/T 482-2022 Copper and Copper Alloy Analysis Methods: Spark Discharge Atomic Emission Spectrometry
Related Standards
GB/T 8000-2001
Replaced
GB/T 8000-2001 Brass tube in heat-exchanger—Ammonial test for residual stress corrosion
GB/T 11087-2001
Replaced
GB/T 11087-2001 Brass strip for heat-exchanger tubing
GB/T 5231-2001
Replaced
GB/T 5231-2001 Wrought copper and copper alloys chemical composition limits and forms of wrought products
GB/T 18813-2002
Replaced
GB/T 18813-2002 Transformer copper strip
GB/T 2040-2002
Replaced