T/CIET 722-2024 Active Group standards

T/CIET 722-2024 Highly pure sputtering target material for semiconductors

Publish Date: 2024-10-23 Implement Date: 2024-10-23 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CIET 722-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Semiconductor materials

Publish Date: 2024-10-23

Implement Date: 2024-10-23

Scope

Scope: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of high-purity sputtering targets for semiconductors. This document is applicable to high-purity sputtering targets for semiconductors; Main technical content: This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage of high-purity sputtering targets for semiconductors. This document is applicable to high-purity sputtering targets for semiconductors.