GB/T 35158-2017 Active National standards

GB/T 35158-2017 Verification method for Auger electron spectrometers

GB/T 35158-2017 Verification method for Auger electron spectrometers

Publish Date: 2017-12-29 Implement Date: 2018-11-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 35158-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2017-12-29

Implement Date: 2018-11-01

Pages: 60 pages

Scope

This standard specifies the calibration method for Auger electron spectrometers. This standard is applicable to Auger electron spectrometers with an electron beam as the excitation source and an ion gun for sputter cleaning.

Development Information

Word Count: 112 Thousand words Pages: 60 pages

Referenced Standards

GB/T 20175-2006 Surface chemical analysis—Sputter depth profiling—Optimization using layered system as reference materials GB/T 21006-2007 Surface chemical analysis—X-ray photoelectron and Auger electron spectrometers—Linearity of intensity scale GB/T 28632-2012 Surface chemical analysis—Auger electron spectroscopy and X-ray photoelectron spectroscopy—Determination of lateral resolution GB/T 29558-2013 Surface chemical analysis—Auger electron spectroscopy—Repeatability and constancy of intensity scale GB/T 29731-2013 Surface chemical analysis—High-resolution Auger electron spectrometers—Calibration of energy scales for elemental and chemical-state analysis GB/T 29732-2013 Surface chemical analysis—Medium resolution Auger electron spectrometers—Calibration of energy scales for elemental analysis GB/T 32998-2016 Surface chemical analysis—Auger electron spectroscopy—Reporting of methods used for charge control and charge correction ISO 16531:2013 ISO 17109:2015

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