GB/T 11093-1989
Replaced
T/ZZB 0648-2018
Active
Group standards
T/ZZB 0648-2018 200 mm heavy phosphorus-doped straight pull silicon single crystal polished wafer
T/ZZB 0648-2018 200 mm heavy phosphorus-doped straight pull silicon single crystal polished wafer
Price:
$ 20.00
Basic Information
Standard Code:
T/ZZB 0648-2018
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Element semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2018-10-19
Implement Date:
2018-11-01
Scope
Main technical content: This standard specifies the terms and definitions, product classification, basic requirements, technical requirements, test methods, inspection rules, packaging, marking, transportation and storage, and the content of purchase orders (or contracts) and quality commitments for 200 mm phosphorus-doped single-crystal silicon wafers. This standard applies to 200 mm silicon single-crystal wafers prepared by the direct-pulling method using electronic-grade polycrystalline silicon as the main raw material. The products are mainly used as substrates for integrated circuits and discrete devices
Development Information
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced