T/CNIA 0101-2021 Active Group standards

T/CNIA 0101-2021 Green Design Product Evaluation Specification for Silicon Carbide Monocrystal Polishing Pieces

Publish Date: 2021-03-19 Implement Date: 2021-09-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CNIA 0101-2021

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Semiconductor materials

Publish Date: 2021-03-19

Implement Date: 2021-09-01

Scope

Main technical content: This document specifies the evaluation requirements for the green design of 4H and 6H silicon carbide single-crystal polished wafers, the preparation method of the life cycle assessment report, and the evaluation methods and processes. This document is applicable to the evaluation of green design products of 4H and 6H silicon carbide single-crystal polished wafers produced by physical vapor deposition method.