GB/T 25915.10-2021 Cleanrooms and associated controlled environments—Part 10:Classification of surface cleanliness by chemical concentration

Scope

This document defines a surface cleanliness classification system for the presence of compounds or chemical substances (including molecules, ions, atoms, and particulate matter) in cleanrooms.
This document applies to all surfaces in cleanrooms and related controlled environments, such as walls, ceilings, floors, work environments, tools, equipment, and devices.
Note 1: This document only considers the chemical properties of microparticles and does not consider their physical properties. This document does not include the interaction between pollutants and surfaces.
Note 2: This document does not address the process of pollution generation, time-related factors (settling, deposition, aging, etc.) and process-related activities (such as transfer, processing, etc.), nor does it address the guidelines for statistical quality control techniques to ensure compliance.

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