T/IAWBS 021-2024 Active Group standards

T/IAWBS 021-2024 Checking method for edge profile of silicon carbide wafers

Publish Date: 2024-04-01 Implement Date: 2024-04-09 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/IAWBS 021-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Semi-metals and semiconductor materials

ICS Name: Semiconductor materials

Publish Date: 2024-04-01

Implement Date: 2024-04-09

Scope

Scope: This document specifies the testing method for the edge profile (including cuts) of silicon carbide wafers. This document is applicable to testing the edge profile (including cuts) of silicon carbide wafers after beveling. The testing of the edge profile of wafers made from other materials can be carried out by referring to this standard. Main technical content: This document specifies the testing method for the edge profile (including cuts) of silicon carbide wafers. This document is applicable to testing the edge profile (including cuts) of silicon carbide wafers after beveling. The testing of the edge profile of wafers made from other materials can be carried out by referring to this standard.