GB/T 11093-1989
Replaced
T/ICMTIA 4.1-2020
Active
Group standards
T/ICMTIA 4.1-2020 The monomer for fluorinated argon resist used in integrated circuits, Part 1: Liquid methacrylate derivatives
T/ICMTIA 4.1-2020 The monomer for fluorinated argon resist used in integrated circuits, Part 1: Liquid methacrylate derivatives
Price:
$ 20.00
Basic Information
Standard Code:
T/ICMTIA 4.1-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Synthetic materials
ICS Name:
Semiconductor materials
Publish Date:
2020-12-31
Implement Date:
2021-03-01
Scope
Scope: This document is applicable to monomers synthesized from organic raw materials, solvents, suitable polymerization inhibitors, and other components, which can be used for the preparation of fluorinated argon resins after refining; Main technical content: This document specifies the terms and definitions of fluorinated argon photoresist monomers for integrated circuits, Part 1: Liquid methacrylate esters, product types and structural characteristics, technical requirements, analysis and detection methods, process requirements, packaging, storage, and transportation requirements, etc.
Development Information
Same series standard
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced