T/CIET 1271-2025
Active
Group standards
T/CIET 1271-2025 Technical Specifications for the Preparation of Silicon Carbide Epitaxial Wafers by Chemical Vapor Deposition (CVD) Method
T/CIET 1271-2025 Silicon carbide epitaxial wafer preparation specification: Chemical vapor deposition (CVD) method
Price:
$ 20.00
Basic Information
Standard Code:
T/CIET 1271-2025
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
Semiconductor materials
Publish Date:
2025-05-08
Implement Date:
2025-05-08
Scope
Scope: This document specifies the basic requirements, preparation process, quality assurance, and safety requirements for the preparation of 4H silicon carbide (SiC) epitaxial wafers by chemical vapor deposition (CVD). This document is applicable to the production and inspection of 4H-SiC epitaxial wafers prepared by CVD. Main technical content: This document specifies the basic requirements, preparation process, quality assurance, and safety requirements for the preparation of 4H silicon carbide (SiC) epitaxial wafers by chemical vapor deposition (CVD). This document is applicable to the production and inspection of 4H-SiC epitaxial wafers prepared by CVD.
Development Information
Related Standards
GB/T 11093-1989
Replaced
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced