GB/T 20726-2025 Microbeam analysis—Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers(EDS)for use with a scanning electron microscope (SEM)or an electron probe microanalyser(EPMA)

Scope

This document specifies the most important characteristic parameters of X-ray spectrometers, which are mainly composed of semiconductor detectors, preamplifiers, and signal processing systems.
This document is only applicable to spectrometers using semiconductor detectors based on the solid-state ionization principle.
This document stipulates the minimum requirements and verification methods for the performance parameters of such spectrometers used in conjunction with scanning electron microscopes (SEMs) or electron probe microanalyzers (EPMAs). The procedures used for spectral analysis are specified in ISO 22309[2] and ASTM E1508[3], and are not within the scope of this document. [2] ISO 22309: Specification for X-ray fluorescence spectrometers - Part 1: General requirements and test methods. [3] ASTM E1508: Standard Test Method for Measuring the X-ray Fluorescence Emission of Elements in Solid Materials Using an Electron Probe Microanalyzer.

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