T/IAWBS 016-2022 Active Group standards

T/IAWBS 016-2022 Carbon-doped silicon monocrystal X-ray double crystal waver curve half-width testing method

Publish Date: 2022-03-17 Implement Date: 2022-03-24 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/IAWBS 016-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: \nTest methods for the physical and chemical properties of metals

ICS Name: Semiconductor materials

Publish Date: 2022-03-17

Implement Date: 2022-03-24

Pages: 9 pages

Scope

Scope: This document specifies the method of testing the half-peak width of the swing curve of silicon carbide single crystals using a double-crystal X-ray diffractometer. This document is applicable to silicon carbide single crystals grown by physical vapor deposition and other methods. This document is applicable to the detection of the swing curve of silicon carbide single crystals at room temperature in the normal orientation and with an inclined angle; Main technical content: This document specifies the measurement principles, measurement accuracy assurance, and measurement steps of the swing curve of silicon carbide single crystals based on the material performance characteristics of silicon carbide single crystals and the current research level of silicon carbide crystal quality detection technology in China. The main structure and content of this document are as follows: The document is divided into 9 chapters, and the main contents include: Scope, Normative References, Terms and Definitions, Test Principles, Test Instruments, Interference Factors, Test Environment, Test Samples, Test Procedures, Precision, Test Reports, and Appendices.