GB/T 1175-1997
Replaced
GB/T 20510-2024
Active
National standards
GB/T 20510-2024 Indium-tin oxide target
GB/T 20510-2024 Indium-tin oxide target
Basic Information
Standard Code:
GB/T 20510-2024
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Heavy metals and their alloys
ICS Name:
Lead, zinc, and tin products
Publish Date:
2024-09-29
Implement Date:
2025-04-01
Pages:
16 pages
Scope
This document specifies the classification, technical requirements, test methods, inspection rules, and markings of indium tin oxide targets (hereinafter referred to as ITO targets), as well as their packaging, transportation, and storage, and the contents of accompanying documents and purchase orders. This document applies to indium tin oxide targets produced by sintering In2O3 and SnO2 powders at atmospheric pressure, which are the core materials for manufacturing transparent conductive films.
Development Information
Replace the following standards
Referenced Standards
GB/T 1551-1995 Test method for resistivity of silicon and germanium bars using a two-point probe
GB/T 1551-2009 Test method for measuring resistivity of monocrystal silicon
GB/T 1551-2021 Test method for measuring resistivity of monocrystal silicon—In-line four-point probe and direct current two-point probe method
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3850-2015 Impermeable sintered metal materials and hardmetals—Determination of density
GB/T 6569-1986 Testing method for flexural strength of high performance ceramics
GB/T 6569-2006 Fine ceramics(advanced ceramics,advanced technical ceramics)—Test method for flexural strength of monolithic ceramics at room temperature
GB/T 8170-1987 Rules for rounding off of numberical values
GB/T 8170-2008 Rules of rounding off for numerical values & expression and judgement of limiting values
GB/T 13298-1991 Metal—Inspection method of microstructure
GB/T 13298-2015 Inspection methods of microstructure for metals
GB/T 16535-1996 Test method for linear thermal expansion of high performance ceramics
GB/T 16535-2008 Fine ceramics(advanced ceramics,advanced technical ceramics)—Test method for linear thermal expansion of monolithic ceramics by push-rod technique
GB/T 38389-2019 Methods for chemical analysis of indium-tin oxide target
YS/T 837-2012 Standard practice for ultrasonic C-scan bond evaluation of sputtering target-backing plate assemblies
SL 499-2010 Standard Test Method for Measuring Residual Stress by Drilling Strain Method with Standard Test Method for Sl 499-2010