GB/T 15861-2012
Active
GB/T 37466-2019
Active
National standards
GB/T 37466-2019 Laser lift-off equipment used for GaN
GB/T 37466-2019 Laser lift-off equipment used for GaN
Basic Information
Standard Code:
GB/T 37466-2019
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic industry production equipment
ICS Name:
Electronic product production equipment
Publish Date:
2019-06-04
Implement Date:
2019-10-01
Publisher:
国家市场监督管理总局、中国国家标准化管理委员会
Technical Committee:
全国半导体设备和材料标准化技术委员会(SAC/TC 203)
Pages:
17 pages
Scope
本标准规定了氮化镓激光剥离设备(以下简称“激光剥离设备”)的产品分类和标记、工作条件、要求、检测方法、检验规则、标志、包装、运输和贮存。
本标准适用于利用激光方法将蓝宝石衬底生长的氮化镓(GaN)基外延层进行剥离的设备,氮化铝激光剥离设备可参考本标准。
Development Information
Drafting Units:
东莞市中镓半导体科技有限公司、中国电子技术标准化研究院
Drafting Persons:
孙永健、刘鹏、丁晓民、冯亚彬、汪青
Referenced Standards
GB 2893-2008 Safety colours
GB 2894-2008 Safety signs and guideline for the use
GB/T 3768-2017 Acoustics—Determination of sound power levels and sound energy levels of noise sources using sound pressure—Survey method using an enveloping measurement surface over a reflecting plane
GB/T 4208-2017 Degrees of protection provided by enclosure(IP code)
GB 4824-2013 Industrial,scientific and medical(ISM) radio-frequency equipment—Disturbance characteristics—Limits and methods of measurement
GB/T 4942.1-2006 Degrees of protection provided by the integral design of rotating electrical machined(IP code)—Classification
GB/T 5080.7-1986 Equipment reliability testing Compliance test plans for failure rate and mean time between failures assuming constant failure rate
GB/T 5171.1-2014 Small power motors—Part 1:General technical requirements
GB 5226.1-2008 Electrical safety of machinery—Electrical equipment of machines—Part 1:General requirements
GB 7247.1-2012 Safety of laser products—Part 1:Equipment classification and requirements
GB/T 7251.1-2013 Low-voltage switchgear and controlgear assemblies—Part 1:General rules
GB/T 15706-2012 Safety of machinery—General principles for design—Risk assessment and risk reduction
GB/T 18268.1-2010 Electrical equipment for measurement,control and laboratory use—EMC requirements—Part 1:General requirements
GB/T 18490.1-2017 Safety of machinery—Laser processing machines—Part 1:General safety requirement
GB/T 191-2000 Packaging—Pictorial marking for handling of goods
GB/T 191-2008 Packaging—Pictorial marking for handling of goods
GB/T 6388-1986 Transport package shipping mark
GB/T 9969-2008 General principles for preparation of instructions for use of industrial products
GB 9969.1-1998 General principles for preparation of instructions for use of industrial products
GB/T 14436-1993 General principles of industrial product guarantee documents
SJ/T 37-1996 Model-drafting and designating methods of special equipment for electronics industry
GB 50073-2013 Code for design of clean room
GB/T 50087-2013 Specifications for the design of noise control system in industrial enterprises
GB/T 191-2025 Graphical symbols marking for handling and storage of packages
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GB/T 30116-2013
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GB/T 30116-2013 Requirements for semiconductor manufacturing facility electromagnetic compatibility
DB44/T 1668-2015
Abolished
DB44/T 1668-2015 Li-ion battery continuous welding machine
DB44/T 1667-2015
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