SJ/T 11761-2020 Active Industry standards-Electronics

SJ/T 11761-2020 Specification for loading ports of semiconductor equipment for wafers with diameters of 200mm or less

Publish Date: 2020-12-09 Implement Date: 2021-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: SJ/T 11761-2020

Standard Type: Industry standards

Standard Status: Active

is_force_gb: no

CCS Name: Electronic industry production equipment

ICS Name: Electronic product production equipment

Publish Date: 2020-12-09

Implement Date: 2021-04-01

Scope

A loading port for semiconductor equipment suitable for processing wafers with a diameter of 200 mm or less

Development Information

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