GB/T 3656-1983
Replaced
GB/T 4059-2018
Active
National standards
GB/T 4059-2018 Test method for phosphorus content in polycrystalline silicon by zone-melting method under controlled atmosphere
GB/T 4059-2018 Test method for phosphorus content in polycrystalline silicon by zone-melting method under controlled atmosphere
Basic Information
Standard Code:
GB/T 4059-2018
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Analysis methods for semi-metallic and semiconductor materials
ICS Name:
\nMetal material testing
Publish Date:
2018-12-28
Implement Date:
2019-11-01
Publisher:
国家市场监督管理总局、中国国家标准化管理委员会
Technical Committee:
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分会(SAC/TC 203/SC 2)
Pages:
8 pages
Scope
本标准规定了多晶硅中基磷含量的检验方法。本标准适用于在硅芯上沉积生长的多晶硅棒中基磷含量(原子数)的测定,测定范围为0.01×1013 cm-3~500×1013 cm-3。
Development Information
Drafting Units:
江苏中能硅业科技发展有限公司、青海黄河上游水电开发有限责任公司新能源分公司、亚洲硅业(青海)有限公司、内蒙古神舟硅业有限责任公司、新特能源股份有限公司、宜昌南玻硅材料有限公司、洛阳中硅高科技有限公司、新疆大全新能源股份有限公司、鄂尔多斯多晶硅业有限公司、内蒙古盾安光伏科技有限公司、新疆协鑫新能源材料科技有限公司、乐山市产品质量监督检验所、山东大海新能源发展有限公司
Drafting Persons:
胡伟、耿全荣、胡自强、鲁文锋、柳德发、薛心禄、蔡延国、尹东林、宗凤云、邱艳梅、刘国霞、高明、楚东旭、刘翠、王瑞、姚利忠、梁洪、唐珊珊、王佳
Replace the following standards
Referenced Standards
GB/T 11446.1-2013 Electronic grade water
GB/T 25915.1-2010 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness
GB/T 1550-1997 Standard methods for measuring conductivity type of extrinsic semiconducting materials
GB/T 1550-2018 Test methods for conductivity type of extrinsic semiconducting materials
GB/T 1551-1995 Test method for resistivity of silicon and germanium bars using a two-point probe
GB/T 1551-2009 Test method for measuring resistivity of monocrystal silicon
GB/T 1551-2021 Test method for measuring resistivity of monocrystal silicon—In-line four-point probe and direct current two-point probe method
GB/T 4060-1983 Polycrystalline silicon—Examination method—Vacuum zone-melting on boron
GB/T 4060-2007 Polycrystalline silicon—Examination method—Vacuum zone-melting on boron
GB/T 4060-2018 Test method for boron content in polycrystalline silicon by vacuum zone-melting method
GB/T 4842-1995 Pure argon
GB/T 4842-2006 Argon
GB/T 4842-2017 Argon
GB/T 8979-1996 Pure nitrogen
GB/T 8979-2008 Pure nitrogen and high purity nitrogen and ultra pure nitrogen
GB/T 14264-1993 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2024 Terminology of semiconductor materials
GB/T 24574-2009 Test methods for photoluminescence analysis of single crystal silicon for Ⅲ-Ⅴ impurities
GB/T 24581-2009 Test method for low temperature FT-IR analysis of single crystal silicon for Ⅲ-Ⅴ impurities
GB/T 24581-2022 Test method for Ⅲ and Ⅴ impurities content in single crystal silicon—Low temperature FT-IR analysis method
GB/T 8979-2025 Pure nitrogen,high purity nitrogen and ultra pure nitrogen
Related Standards
GB/T 3657-1983
Replaced
GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys
GB/T 3849-1983
Replaced
GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method
GB/T 3850-1983
Replaced
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3851-1983
Replaced
GB/T 3851-1983 Hardmetals—determination of transverse rupture strength
GB/T 4326-1984
Replaced