GB/T 30652-2023 Active National standards

GB/T 30652-2023 Trichlorosilane for silicon epitaxial

GB/T 30652-2023 Trichlorosilane for silicon epitaxial

Publish Date: 2023-08-06 Implement Date: 2024-03-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 30652-2023
Standard Type: National standards
Standard Status: Active
is_force_gb: no
CCS Name: Compound semiconductor materials
ICS Name: Semiconductor materials
Publish Date: 2023-08-06
Implement Date: 2024-03-01
Pages: 9 pages

Scope

This document specifies the technical requirements, test methods, inspection rules, marking, packaging, transportation, storage, accompanying documents, and order form content for silicon epitaxy-grade trichlorosilane (SiHCl 3).
This document applies to silicon epitaxy-grade trichlorosilane (hereinafter referred to as the product) refined and purified from trichlorosilane as a raw material.

Development Information

Word Count: 19 Thousand words Pages: 9 pages

Replace the following standards

Referenced Standards

GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 191-2000 Packaging—Pictorial marking for handling of goods GB/T 191-2008 Packaging—Pictorial marking for handling of goods GB/T 1551-1995 Test method for resistivity of silicon and germanium bars using a two-point probe GB/T 1551-2009 Test method for measuring resistivity of monocrystal silicon GB/T 1551-2021 Test method for measuring resistivity of monocrystal silicon—In-line four-point probe and direct current two-point probe method GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB 12463-1990 General specifications for transport packages of dangerous goods GB 12463-2009 General specifications for transport packages of dangerous goods GB/T 14264-1993 Semiconductor materials—Terms and definitions GB/T 14264-2009 Semiconductor materials—Terms and definitions GB/T 14264-2024 Terminology of semiconductor materials GB 15258-1999 General rules for preparation of precautionary label for industrial chemicals GB 15258-2009 General rules for preparation of precautionary label for chemicals GB 16483-2000 General rules for preparation of chemical safety data sheet GB/T 16483-2008 Safety data sheet for chemical products—Content and order of sections GB/T 24581-2009 Test method for low temperature FT-IR analysis of single crystal silicon for Ⅲ-Ⅴ impurities GB/T 24581-2022 Test method for Ⅲ and Ⅴ impurities content in single crystal silicon—Low temperature FT-IR analysis method GB/T 26571-2011 Specification for the shelf life of a specialty gas GB/T 28654-2012 Trichlorosilane for industrial use GB/T 28654-2018 Trichlorosilane for industrial use GB/T 29056-2012 Trichlorosilane for silicon epitaxy—Determination of boron,aluminium,phosphorus,vanadium,chrome,manganese,iron,cobalt,nickel,copper,arsenic,molybdenum and antimony content—Inductively coupled plasma mass spectrometric method GB/T 29057-2012 Practice for evaluation of polocrystalline silicon rods by float-zone crystal growth and spectroscopy GB/T 29057-2023 Practice for evaluation of polocrystalline silicon rods by float-zone crystal growth and spectroscopy GB 30000.19-2013 Rules for classification and labelling of chemicals—Part 19:Skin corrosion/irritation YS/T 987-2014 Test method for measuring carbon containing compound in chlorosilane—Determination of methyldichlorosilane YS/T 1059-2015 Determination of total carbon content in trichlorosilane for silicon eqitaxy—Gas chromatographic method YS/T 1060-2015 Determination of other chlorosilane in trichlorosilane for silicon eqitaxy—Gas chromatographic method YS/T 987-2021 The determination of carbon content in chlorosilanes by gas chromatography-mass spectrometry GB/T 191-2025 Graphical symbols marking for handling and storage of packages GB/T 29056-2025 Determination of impurity content in trichlorosilane for silicon epitaxy—Inductively coupled plasma mass spectrometry

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