GB/T 3656-1983
Replaced
GB/T 29057-2023
Active
National standards
GB/T 29057-2023 Practice for evaluation of polocrystalline silicon rods by float-zone crystal growth and spectroscopy
GB/T 29057-2023 Practice for evaluation of polocrystalline silicon rods by float-zone crystal growth and spectroscopy
Basic Information
Standard Code:
GB/T 29057-2023
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Semi-metals and semiconductor materials
ICS Name:
\nMetal material testing
Publish Date:
2023-08-06
Implement Date:
2024-03-01
Publisher:
国家市场监督管理总局、国家标准化管理委员会
Technical Committee:
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分技术委员会(SAC/TC 203/SC 2)
Pages:
13 pages
Scope
本文件规定了多晶硅棒取样、将样品区熔拉制成单晶以及通过低温红外光谱法或光致发光光谱法对拉制好的单晶硅棒进行分析以确定多晶硅中施主、受主、代位碳和间隙氧杂质含量等的规程。本文件适用于评价硅芯上沉积生长的棒状多晶硅。
Development Information
Drafting Units:
青海黄河上游水电开发有限责任公司新能源分公司、有色金属技术经济研究院有限责任公司、亚洲硅业(青海)股份有限公司、洛阳中硅高科技有限公司、四川永祥新能源有限公司、新疆大全新能源股份有限公司、江苏中能硅业科技发展有限公司、新疆新特新能材料检测中心有限公司、陕西有色天宏瑞科硅材料有限责任公司、江苏鑫华半导体科技股份有限公司、宜昌南玻硅材料有限公司、青海丽豪半导体材料有限公司、乐山市产品质量监督检验所、新疆协鑫新能源材料科技有限公司
Drafting Persons:
秦榕、薛心禄、李素青、王志强、万烨、贺东江、岳峥、张孝山、赵生良、郭光伟、陈雪刚、于生海、邓远红、王彬、邱艳梅、徐岩、刘国霞、万首正、田洪先、刘文明、赵小飞、梁洪、赵娟龙
Replace the following standards
Referenced Standards
GB/T 620-1993 Chemical reagent—Hydrofluoric acid
GB/T 620-2011 Chemical reagent—Hydrofluoric acid
GB/T 626-1989 Chemical reagent—Nitric acid
GB/T 626-2006 Chemical reagent—Nitric acid
GB/T 1550-1997 Standard methods for measuring conductivity type of extrinsic semiconducting materials
GB/T 1550-2018 Test methods for conductivity type of extrinsic semiconducting materials
GB/T 1551-1995 Test method for resistivity of silicon and germanium bars using a two-point probe
GB/T 1551-2009 Test method for measuring resistivity of monocrystal silicon
GB/T 1551-2021 Test method for measuring resistivity of monocrystal silicon—In-line four-point probe and direct current two-point probe method
GB/T 1553-1997 Standard test methods for minority carrier lifetime in bulk germanium and silicon by measurement of photoconductivity decay
GB/T 1553-2009 Test methods for minority carrier lifetime in bulk germanium and silicon by measurement of photoconductivity decay
GB/T 1553-2023 Test methods for minority carrier lifetime in bulk silicon and germanium—Photoconductivity decay method
GB/T 1554-1995 Test method for crystallographic perfection of silicon by preferential etch techniques
GB/T 1554-2009 Testing method for crystallographic perfection of silicon by preferential etch techniques
GB/T 1555-1997 Test methods for determining the orientation of a semiconductor single crystal
GB/T 1555-2009 Testing methods for determining the orientation of a semiconductor single crystal
GB/T 1555-2023 Test methods for determining the orientation of a semiconductive single crystal
GB/T 1557-1989 The method of determining interstitial oxygen content in silicon by infrared absorption
GB/T 1557-2006 The method of determining interstitial oxygen content in silicon by infrared absorption
GB/T 1557-2018 Test method for determining interstitial oxygen content in silicon by infrared absorption
GB/T 1558-1997 Test method for substitutional atomic carbon content of silicon by infrared absorption
GB/T 1558-2009 Test method for substitutional atomic carbon concent of silicon by infrared absorption
GB/T 1558-2023 Test method for substitutional carbon content in silicon by infrared absorption
GB/T 4842-1995 Pure argon
GB/T 4842-2006 Argon
GB/T 4842-2017 Argon
GB/T 11446.1-1997 Electronic grade water
GB/T 11446.1-2013 Electronic grade water
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13389-2014 Practice for conversion between resistivity and dopant density for boron-doped,phosphorus-doped,and arsenic-doped silicon
GB/T 14264-1993 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2024 Terminology of semiconductor materials
GB/T 24574-2009 Test methods for photoluminescence analysis of single crystal silicon for Ⅲ-Ⅴ impurities
GB/T 24581-2009 Test method for low temperature FT-IR analysis of single crystal silicon for Ⅲ-Ⅴ impurities
GB/T 24581-2022 Test method for Ⅲ and Ⅴ impurities content in single crystal silicon—Low temperature FT-IR analysis method
GB/T 25915.1-2010 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness
GB/T 25915.1-2021 Cleanrooms and associated controlled environments—Part 1:Classification of air cleanliness by particle concentration
GB/T 35306-2017 Test method for carbon and oxygen content of single crystal silicon—Low temperature fourier transform infrared spectrometry
GB/T 35306-2023 Determination of carbon and oxygen content in single crystal silicon—Low temperature fourier transform infrared spectrometry method
Related Standards
GB/T 3657-1983
Replaced
GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys
GB/T 3849-1983
Replaced
GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method
GB/T 3850-1983
Replaced
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3851-1983
Replaced
GB/T 3851-1983 Hardmetals—determination of transverse rupture strength
GB/T 4326-1984
Replaced